DUV lithography
Deep Ultraviolet lithography; ASML's mature-node chipmaking technology facing tightening US export restrictions to China.
Last refreshed: 23 April 2026 · Appears in 1 active topic
Will US lawmakers successfully ban DUV machine sales to China, and what does that mean for ASML?
Timeline for DUV lithography
Mentioned in: Japan takes a "beyond Europe" keynote slot in Brussels
European Tech SovereigntyRestricted from export to China under tightened US controls, causing ASML revenue decline
European Tech Sovereignty: ASML Q1 sales hold, China collapses to 19 per cent- What is DUV lithography and why does it matter for semiconductors?
- DUV (Deep Ultraviolet) lithography uses ultraviolet light at 193nm or 248nm to etch chip patterns. It is the dominant technology for mature-node chips and is supplied mainly by ASML from the Netherlands.
- Can ASML sell DUV machines to China?
- Yes, under current export rules. Unlike EUV machines, DUV systems can be legally sold to China, although US pressure is intensifying to restrict that too. In Q1 2026 China's share of ASML's DUV sales fell from 36% to 19%.Source: ASML Investor Relations
- Why is the US trying to ban DUV chip machine exports to China?
- US policymakers view even mature-node DUV equipment as enabling Chinese military chip production. A bipartisan bill introduced after ASML's Q1 2026 results sought to extend restrictions beyond EUV to cover DUV machines.Source: ASML Investor Relations
- What is the difference between DUV and EUV lithography?
- EUV uses extreme ultraviolet light (13.5nm) to print smaller chip features and is required for leading-edge nodes; it cannot be exported to China. DUV uses less energetic UV light (193nm/248nm) for mature nodes and can currently be sold to China.
Background
DUV (Deep Ultraviolet) lithography is the established chipmaking technology used to manufacture semiconductors at mature process nodes. ASML is the dominant supplier of DUV lithography machines and sells them under current export-control rules to China, unlike its EUV (Extreme Ultraviolet) equipment, which cannot be legally exported to China. In Q1 2026, China's demand for DUV machines dropped sharply: China's share of ASML's system sales fell from 36 per cent in Q4 2025 to 19 per cent, a reduction of approximately €1.8bn in a single quarter, driven by tightening US restrictions.
DUV operates using deep ultraviolet light (typically 193nm or 248nm wavelength) to etch circuit patterns onto silicon wafers. It is the workhorse of the global chip industry for nodes above approximately 7nm, covering the vast bulk of chip volume produced worldwide — from automotive and industrial to consumer electronics and defence. ASML's DUV portfolio includes both dry and immersion systems; immersion DUV, which uses water between lens and wafer to improve resolution, is the more advanced class and is the primary target of US restriction efforts.
A bipartisan group of US lawmakers proposed legislation to tighten DUV sales to Chinese chip companies in the days following ASML's Q1 results. ASML CEO Christophe Fouquet acknowledged in his earnings statement that 2026 guidance "accommodates potential outcomes of ongoing discussions around export controls". European semiconductor sovereignty is partly funded by Chinese DUV revenue; the thinning of that revenue stream has direct consequences for ASML's ability to cross-subsidise European R&D.
